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Proceedings of the eleventh International Symposium on Plasma Processing / editors, G.S. Mathad, M. Meyyappan ; [sponsored by] Dielectric Science and Technology and electronics Divisions

資料種別:
図書
出版情報:
Pennington, NJ : the Electrochemical Society, Inc., c1996
形態:
xi, 720 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 96-12 <BA01323290>
著者名:
ISBN:
9781566771641 [1566771641]
書誌ID:
BA29982351
子書誌情報
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