Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997

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Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

資料種別:

図書

出版情報:

Piscataway, N.J. : IEEE Service Center, c1997

形態:

xxiv, 545 p. ; 30 cm

著者名:

ISBN:

9780780337442 [0780337441] (: soft)
9780780337459 [078033745X] (: case)
9780780337466 [0780337468] (: micro)

書誌ID:

BA3046538X

子書誌情報

フルテキスト

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他の版・巻

書誌詳細

その他の標題:	MEMS97 MEMS 97CH36021
注記:	"IEEE catalog number: 97CH36021" Includes bibliographical references and indexes
主題:	Electromechanical devices--Congresses; Microelectronics--Congresses; Miniature objects--Congresses; Robotics--Congresses
言語:	英語

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