Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. | 東京工業大学附属図書館蔵書検索

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Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. / editors, Rafael Reif ... [et al.]

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1997

形態:

ix, 154 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 447 <BA00013775>

著者名:

ISBN:

9781558993518 [1558993517]

書誌ID:

BA3192909X

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Green technology--Congresses; Integrated circuits industry--Safety measures--Congresses; Manufacturing processes--Safety measures--Congresses; Semiconductor industry--Safety measures--Congresses
言語:	英語

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