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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 97 proceedings, September 10-12, 1997, Cambridge, Massachusetts / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c1997
形態:
vi, 460 p. ; 28 cm
著者名:
ISBN:
9780780340503 [0780340507] (: soft.)
9780780340510 [0780340515] (: case.)
書誌ID:
BA32832288
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