Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. / editors, Gregg S. Higashi ... [et al.]

資料種別:: 図書
出版情報:: Pittsburgh, Pa. : Materials Research Society, c1997
形態:: xiii, 545 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 477 <BA00013775>
著者名:: Higashi, Gregg S. <DA02894271>
ISBN:: 9781558993815 [1558993819]
書誌ID:: BA33623148

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注記:	Includes bibliographical references and indexes
主題:	Semiconductors--Cleaning--Congresses; Semiconductors--Surfaces--Congresses; Surface chemistry--Congresses; Surface preparation--Congresses
言語:	英語

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