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Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Tomas Diaz de la Rubia ... [et al.]

資料種別:
図書
出版情報:
Pittsburg, Pa. : Materials Research Society, c1997
形態:
xv, 541 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 469 <BA00013775>
著者名:
Diaz de la Rubia, Tomas  
ISBN:
9781558993730 [1558993738]
書誌ID:
BA34715106
子書誌情報
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