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Defect recognition and image processing in semiconductors 1997 : proceedings of the Seventh International Conference on Defect Recognition and Image Porcessing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September, 1997 / edited by J. Donecker and I. Rechenberg

資料種別:
図書
出版情報:
Bristol : Institute of Physics, c1998
形態:
xx, 524 p. ; 24 cm
シリーズ名:
Institute of Physics conference series ; no. 160 <BA00171324>
著者名:
ISBN:
9780750305006 [0750305002]
書誌ID:
BA37250687
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