Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

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Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California / John C. Stover, chair/editor

資料種別:

図書

出版情報:

Bellingham, Wash. : Sponsored and published by SPIE-The International Society for Optical Engineering, c1998

形態:

vii, 186 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3275 <BA0022700X>

著者名:

ISBN:

9780819427144 [0819427144]

書誌ID:

BA37669537

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 1998 San Jose
注記:	Includes bibliographical references and index
主題:	Flatness measurement--Congresses; Semiconductor wafers--Measurement--Congresses; Surface roughness--Measurement--Congresses
言語:	英語

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