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Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Wei Zhu ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, 1998
形態:
xi, 207 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 509 <BA00013775>
著者名:
Zhum, Wei  
ISBN:
9781558994157 [1558994157]
書誌ID:
BA37860600
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