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Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. / editors, Scott T. Dunham, Jeffrey S. Nelson

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c1998
形態:
ix, 273 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 490 <BA00013775>
著者名:
ISBN:
9781558993952 [1558993959]
書誌ID:
BA38701726
子書誌情報
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