Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. / editors, Scott T. Dunham, Jeffrey S. Nelson
- 資料種別:
- 図書
- 出版情報:
- Warrendale, Pa. : Materials Research Society, c1998
- 形態:
- ix, 273 p. ; 24 cm
- シリーズ名:
- Materials Research Society symposium proceedings ; v. 490 <BA00013775>
- 著者名:
- ISBN:
- 9781558993952 [1558993959]
- 書誌ID:
- BA38701726
類似資料:
Materials Research Society | |
Institute of Electrical and Electronics Engineers, Copies available from IEEE Service Center | |
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Materials Research Society |
6
図書
Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology
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