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Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c1998
形態:
xvi, 560p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; 514 <BA00013775>
著者名:
Murarka, S. P.  
ISBN:
9781558994201 [1558994203]
書誌ID:
BA38805539
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