Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

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Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A. / editors, Stuart Brown ... [et al.]

資料種別:: 図書
出版情報:: Warrendale, Pa. : Materials Research Society, c1998
形態:: xi, 248 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 518 <BA00013775>
著者名:: Brown, Stuart B. <DA07848497>
ISBN:: 9781558994249 [1558994246]
書誌ID:: BA40718415

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注記:

Includes bibliographical references and index

主題:

Material--Research--Equipment and supplies--Congresses; Micromechanical systems--Congresses

言語:

英語

目次情報:

Preface

Acknowledgments

Materials Research Society Symposium Proceedings

Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films / P. Attia ; P. Hesto

Transversal Type Piezoelectric Resonator using ZnO Thin Film on Micro-Fabricated ELINVER (Fe-Ni-Cr-Ti) Alloy / Y. Yoshino

Multilayer Microelectromechanical Structures For Material Property Characterization / R.I. Pratt ; G.C. Johnson

The Effects of Texture and Doping on the Young's Modulus of Polysilicon / Sangwoo Lee ; Changho Cho ; Jongpal Kim ; Sangjun Park ; Sangwoo Yi ; Jongjun Kim ; Dong-II Dan Cho

Mechanical Property Measurement of 0.5[Mu]m CMOS Microstructures / M.S-C. Lu ; X. Zhu ; G.K. Fedder

Heating Effects on the Young's Modulus of Films Sputtered Onto Micromachined Resonators / H. Kahn ; M.A. Huff ; A.H. Heuer

Measurement of Mechanical Properties in Small Dimensions By Microbeam Deflection / O. Kraft ; R. Schwaiger ; W.D. Nix

Failure of Micron Scale Single Crystal Silicon Bars Due to Torsion Developed By MEMS Micro Instruments / Taher Saif ; N.C. MacDonald

Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined By Tensile Testing / S. Greek ; F. Ericson

Round-Robin Tests of Modulus and Strength of Polysilicon / W.N. Sharpe, Jr. ; S. Brown ; W. Knauss

Curvature of a Cantilever Beam Subjected to an Equi-Biaxial Bending Moment / P. Krulevitch

Meso (Intermediate)-Scale Electromechanical Systems For the Measurement and Control of Sagging in LTCC Structures / Patricio Espinoza-Vallejos ; Jihua Zhong ; M. Gongora-Rubio ; Luis Sola-Laguna ; J.J. Santiago-Aviles

Observations of Low-Cycle Fatigue of Al Thin Films For MEMS Applications / G. Cornella ; R.P. Vinci ; R. Suryanarayanan Iyer ; R.H. Dauskardt ; J.C. Bravman

Investigation of the Mechanical Properties and Adhesion of PVD Tungsten Films on Si and Silicon Compounds By Bulge and Blister Tests / Michel Dupeux ; Alain Bosseboeuf ; Denis Buttard

Strength of Surface Micromachined Diaphragms / Xing Yang ; Frances M. Siu ; Yu-Chong Tai

Silicon Oxynitride Membrane For Chemical Sensor Application / S. Astie ; E. Scheid ; A.M. Gue ; J.P. Guillemet ; L. Lescouzeres

Bulge Test Investigation of the Influence of Moisture on Mechanical Properties of Thin Polymer Layers / A. Nakladal ; R. Buchhold ; R. Kohler ; G. Gerlach ; M. Stavrev ; C. Wenzel ; K. Baumann ; B. Nowak

A Novel Technique For the Fabrication of Free-Standing Adhesive Films Using a Polymer Template / D.J. Hansford ; L.P. Lee ; M. Ferrari

Test Methods For Characterizing Piezoelectric Thin Films / F.J. von Preissig ; H. Zeng ; E.S. Kim

Silicon Strength Testing For Mesoscale Structural Applications / Kuo-Shen Chen ; Arturo A. Ayon ; S. Mark Spearing

Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients / M.P. de Boer ; P.J. Clews ; B.K. Smith ; T.A. Michalske

The Fracture Toughness of Polysilicon Microdevices / R. Ballarini ; R.L. Mullen

The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS / Sang-Ho Lee ; Myong-Jong Kwon ; Jin-Goo Park ; Young-Kweon Kim ; Hyung-Jae Shin

Adhesion Promotion By Surface-Modification at the PMMA-Metal Interface For LIGA-Type Processing / S.S. Das ; C.G. Khan Malek

Buckling Evolution of Microelectromechanical Structures / Xin Zhang ; Tong-Yi Zhang ; Yitshak Zohar

MEMS as Temperature Sensors During High-Temperature Processing / H. Tada ; A.R. Abramson ; P. Nieva ; P. Zavracky ; I.N. Miaoulis ; P.Y. Wong

Silicon-Framed Tensile Specimens: Techniques and Results / D.T. Read

Mechanical Property Evaluation of Electroplated High Aspect Ratio Microstructures / L.S. Stephens ; K.W. Kelly ; E.I. Meletis ; S. Simhadri

Tensile Testing of Ultra-Thin-Film Materials Deposited on Polyimide For MEMS Applications / J.H. Tregilgas ; M. Strumpell

Mechanical and Metallographic Characterization of LIGA Fabricated Nickel and 80%Ni-20%Fe Permalloy / T.R. Christenson ; T.E. Buchheit ; D.T. Schmale ; R.J. Bourcier

Polysilicon Tensile Testing With Electrostatic Gripping / W.N. Sharpe Jr. ; K. Turner ; R.L. Edwards

Fracture Strength of Polycrystalline Silicon / P.T. Jones ; R.T. Howe

Measurement of Elastic Modulus and Poisson's Ratio of Diamond-Like Carbon Films / Sung-Jin Cho ; Kwang-Ryeol Lee ; Kwang Yong Eun ; Dae-Hong Ko

Residual Stress of Silicon Films Deposited By LPCVD from Silane / P. Temple-Boyer ; E. Imbernon ; B. Rousset

Internal Stress of ZnO Thin Films Caused By Thickness Distribution and Crystallinity / M. Takeuchi ; K. Inoue ; K. Ohwada

Finite-Element Modelling of Residual Stress in SiC Diaphragms / Russell G. DeAnna ; Christian A. Zorman ; Mehran Mehregany

Finite-Element Simulations of the Mechanical Stress in and Around Narrow TiSi[subscript 2] Lines / A. Steegen ; I. De Wolf ; K. Maex ; M. Ignat

Silicon-Based Epitaxial Films For MEMS / E.A. Fitzgerald ; K.C. Wu ; M. Currie ; N. Gerrish ; D. Bruce ; J. Borenstein

Dopant Mapping and Strain Analysis in B Doped Silicon Structures Using Micro-Raman Spectroscopy / M. Bowden ; D.J. Gardiner ; M.A. Lourenco ; J. Hedley ; D. Wood ; J.S. Burdess ; A.J. Harris

Author Index

Subject Index

Preface

Acknowledgments

Materials Research Society Symposium Proceedings

Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films / P. Attia ; P. Hesto

Transversal Type Piezoelectric Resonator using ZnO Thin Film on Micro-Fabricated ELINVER (Fe-Ni-Cr-Ti) Alloy / Y. Yoshino

Multilayer Microelectromechanical Structures For Material Property Characterization / R.I. Pratt ; G.C. Johnson

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