1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA

所蔵情報QRコード

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA / editors, Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics

資料種別:

図書

出版情報:

Sunnyvale, Calif. : Northern California Chapter of the American Vacuum Society, c1997

形態:

i, 259 p. ; 28 cm

著者名:

International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)

Cheung, Kin P.

Nakamura, Moritaka

Gabriel, Calvin T. <DA10596199>

IEEE Electron Devices Society <DA01257512>

American Vacuum Society

応用物理学会 <DA00633233>

さらに 2 件

ISBN:

9780965157711 [0965157717] (: softbound)
9780780338227 [0780338227] (: microfiche)

書誌ID:

BA41124824

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	P2ID 2nd International Symposium on Plasma Process-Induced Damage
注記:	"IEEE catalog no. 97TH8265"--T.p. verso Includes bibliographical references and index
著者名ヨミ:	オウヨウブツリガッカイ
主題:	Plasma etching--Congresses; Semiconductor wafers--Defects--Congresses; Semiconductors--Effect of radiation on--Congresses
言語:	英語

東工大ブックレビュー

類似資料:

1 図書 2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA (: soft.) International Symposium on Plasma Process-Induced Damage, Engelhardt, Manfred, Hook, Terence, Gabriel, Calvin T., IEEE … American Vacuum Society - Northen California Chapter	7 図書 2000, 5th international symposium on plasma process - induced damage Koyanagi, Mitsumasa, Engelhardt, Manfred, Gabriel, Calvin T. American Vacuum Society
2 図書 1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA (:softbound ; :microfiche) International Symposium on Plasma Process-Induced Damage, Nakamura, Moritaka, Dao, Leanne Thuy Lien, 1953-, Hook, … Northern California Chapter of the American Vacuum Society	8 図書 Proceedings of the Ninth Symposium on Plasma Processing Symposium on Plasma Processing, Mathad, G. S., Hess, Dennis W., Electrochemical Society. Dielectric Science and … Electrochemical Society
3 図書 2002 7th International Symposium on Plasma- and Process-Induced Damage International Symposium on Plasma Process-Induced Damage, Hook, Terence, Eriguchi, Koji, Gabriel, Calvin T., IEEE … AVS	9 図書 Proceedings of the Fifth Symposium on Plasma Processing Symposium on Plasma Processing, Mathad, G. S., Schwartz, G. C., Smolinsky, G., Electrochemical Society. Dielectrics and … Electrochemical Society
4 図書 1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA (:softbound) International Symposium on Plasma Process-Induced Damage, Koyanagi Mitsumasa, Dao, Leanne Thuy Lien, 1953-, Hook, … the American Vacuum Society	10 電子ブック 2nd International Symposium on Plasma Process-Induced Damage IEEE Electronic Library (IEL) Conference Proceedings, IEEE
5 図書 1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA (:soft ; :micro) International Symposium on Plasma Process-Induced Damage, Cheung, Kin P., Nakamura, Moritaka, Gabriel, Calvin T., IEEE … Northern California Chapter of the American Vacuum Society	11 図書 Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas Ghanbari, Abe, Toprac, Anthony J., Society of Photo-optical Instrumentation Engineers SPIE
6 図書 2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France International Symposium on Plasma Process-Induced Damage, Hook, Terence, Eriguchi, Koji, Krishnan, S. IEEE Operations Center	12 図書 Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. Donnelly, Vincent M., Herman, Irving P., 広瀬, 全孝(1939-), Materials Research Society, Materials Research Society. … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12