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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society]

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1998

形態:

xiii, 650 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 97-35 <BA01323290>

著者名:

ISBN:

9781566771887 [1566771889]

書誌ID:

BA43170130

子書誌情報

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書誌詳細

その他の標題:	Cleaning technology in semiconductor device manufacturing V
注記:	"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface Includes bibliographical references and indexes
主題:	Semiconductor wafers--Cleaning--Congresses
言語:	英語

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