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Dielectric material integration for microelectronics / editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1998
形態:
x, 366 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 98-3 <BA01323290>
著者名:
ISBN:
9781566771979 [1566771978]
書誌ID:
BA43172781
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