Microlithography : science and technology

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Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith

資料種別:

図書

出版情報:

New York : Marcel Dekker, c1998

形態:

xii, 780 p. ; 24 cm

著者名:

ISBN:

9780824799533 [0824799534]

書誌ID:

BA43205315

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

注記:

Includes bibliographical references and index

主題:

Integrated circuits--Masks; Manufacturing processes; Metal oxide semiconductors, Complementary--Design and construction; Microlithography--Industrial applications

言語:

英語

目次情報:

Exposure Systems

System Overview of Optical Steppers and Scanners

Optical Lithography Modeling

Optics for Photolithography

Krypton Fluoride Excimer Laser for Advanced Microlithography

Alignment and Overlay

Electron Beam Lithography Systems

X-Ray Lithography

Resists and Processing

Chemistry of Photoresist Materials

Resist Processing

Multilayer Resist Technology

Dry Etching of Photoresists

Metrology and Nanolithography

Dimensional Metrology

E-Beam and Proximal Probe

Exposure Systems

System Overview of Optical Steppers and Scanners

Optical Lithography Modeling

Optics for Photolithography

Krypton Fluoride Excimer Laser for Advanced Microlithography

Alignment and Overlay

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