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Proceedings of the twelfth International Symposium on Plasma Processing / editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions

資料種別:
図書
出版情報:
Pennington, NJ : the Electrochemical Society, Inc., c1998
形態:
viii, 292 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 98-4 <BA01323290>
著者名:
ISBN:
9781566771986 [1566771986]
書誌ID:
BA43283625
子書誌情報
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