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Proceedings of the twelfth International Symposium on Plasma Processing / editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions

資料種別:

図書

出版情報:

Pennington, NJ : the Electrochemical Society, Inc., c1998

形態:

viii, 292 p. ; 24 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 98-4 <BA01323290>

著者名:

ISBN:

9781566771986 [1566771986]

書誌ID:

BA43283625

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

その他の標題:	Plasma processing XII
注記:	Includes bibliographical references and index
言語:	英語

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