Microelectromechanical systems (MEMS) 1997 : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas

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Microelectromechanical systems (MEMS) 1997 : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas / edited by W.S. Chang ... [et al.] ; sponsored by the Dynamic Systems and Control Division, ASME

資料種別:

図書

出版情報:

New York, N.Y. : American Society of Mechanical Engineers, c1997

形態:

vii, 284 p. ; 28 cm

シリーズ名:

DSC ; vol. 62 <BA10135462>
HTD ; vol. 354 <BA00053441>

著者名:

ISBN:

9780791818435 [0791818438]

書誌ID:

BA44129143

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Electromechanical devices--Congresses; Microelectromechanical systems--Congresses; Microelectronics--Congresses
言語:	英語

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