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1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : 10 years of advancing the science of semiconductor manufacturing excellence : ASMC 99 proceedings, September 8-10, 1999, Boston, Massachusetts, USA / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c1999
形態:
vi, 455 p. ; 28 cm
著者名:
ISBN:
9780780352179 [0780352173] (: soft.)
9780780352186 [0780352181] (: case.)
書誌ID:
BA45179464
子書誌情報
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