1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : 10 years of advancing the science of semiconductor manufacturing excellence : ASMC 99 proceedings, September 8-10, 1999, Boston, Massachusetts, USA

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1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : 10 years of advancing the science of semiconductor manufacturing excellence : ASMC 99 proceedings, September 8-10, 1999, Boston, Massachusetts, USA / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Service Center, c1999

形態:

vi, 455 p. ; 28 cm

著者名:

ISBN:

9780780352179 [0780352173] (: soft.)
9780780352186 [0780352181] (: case.)

書誌ID:

BA45179464

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	99CH36295 99CB36295
ISSN:	10788743
注記:	Includes bibliographical references "IEEE catalog number 99CH36295"
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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