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1999 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, October 11-13, 1999, Santa Clara, California / IEEE International Symposium on Semiconductor Manufacturing ; Institute of Electrical and Electronics Engineers

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c1999
形態:
xi, 469 p. ; 28 cm
著者名:
ISBN:
9780780354036 [0780354036] (: soft.)
9780780354043 [0780354044] (: case.)
書誌ID:
BA45250219
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