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Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia / Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c1999
形態:
viii, 428 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3891 <BA0022700X>
著者名:
Bergmann, Neil W.
Reinhold, Olaf <DA1249443X>
Tien, Norman C.
Society of Photo-optical Instrumentation Engineers <DA00848546>
IREE Society
Queensland Government State Development
さらに 1 件
ISBN:
9780819434920 [0819434922]
書誌ID:
BA45648281
子書誌情報
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