Optical microlithography XII : 17-19 March 1999, Santa Clara, California / Luc Van den hove chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; Cooperating organizations SEMI-Semiconductor Equipment and Materials International
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : SPIE, c1999
- 形態:
- 2 v. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3679 <BA0022700X>
- 著者名:
- ISBN:
- 9780819431530 [0819431532] (: set)
- 書誌ID:
- BA45980437
類似資料:
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering |
S.P.I.E.-- International Society for Optical Engineering |