Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California / chair/editor Will Conley ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1999

形態:

2v. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3678 <BA0022700X>

著者名:

ISBN:

9780819431523 [0819431524] (: set)

書誌ID:

BA45995999

子書誌情報

フルテキスト

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書誌詳細

その他の標題:	Advances in resist technology and processing XVI : microlithography 1999 : 15-17 March 1999, Santa Clara, California
注記:	Includes bibliographical references and index
言語:	英語

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1 図書 Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Conley, Will SPIE	7 図書 Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California (pbk.) Willson, C. G. (C. Grant), 1939-, Society of Photo-optical Instrumentation Engineers SPIE--the International Society for Optical Engineering
2 図書 Optical microlithography XII : 17-19 March 1999, Santa Clara, California (: set ; pt. 1 ; pt. 2) Van den hove, Luc, Society of Photo-optical Instrumentation Engineers SPIE	8 図書 Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California Advances in resist technology and processing, Tarascon-Auriol, R. G., Society of Photo-optical Instrumentation Engineers SPIE
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6 図書 Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California (pbk.) Thompson, L. F., 1944-, International Society for Hybrid Microelectronics, Society of Photo-optical Instrumentation … SPIE--the International Society for Optical Engineering	12 図書 Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA (SET ; pt. 1 ; pt. 2) Society of Photo-optical Instrumentation Engineers, Houlihan, Francis M. SPIE

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