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Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors: S.V. Babu ... [et al.]

資料種別:
図書
出版情報:
Warrendale, PA : Materials Research Society, c2000
形態:
ix, 281 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 566 <BA00013775>
著者名:
Babu, S.V.  
ISBN:
9781558994737 [1558994734]
書誌ID:
BA46033861
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