Micromachined transducers sourcebook | 東京工業大学附属図書館蔵書検索

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Micromachined transducers sourcebook / Gregory T.A. Kovacs

資料種別:: 図書
出版情報:: Boston, Mass. : WCB/McGraw-Hill, c1998
形態:: xx, 911, 3 p. ; 25 cm
シリーズ名:: McGraw-Hill series in electrical and computer engineering ; . Electronics and VLSI circuits <BA17057582>
著者名:: Kovacs, Gregory T. A.
ISBN:: 9780072907223 [0072907223]
書誌ID:: BA48703342

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注記:

Includes bibliographical references (p. 883-899) and index

主題:

Microelectromechanical systems; Transducers

言語:

英語

目次情報:

Introduction and Overview / 1：

Micromachining Techniques / 2：

Mechanical Transducers / 3：

Optical Transducers / 4：

Ionizing Radiation Transducers / 5：

Thermal Transducers / 6：

Magnetic & Electromagnetic Transducers / 7：

Chemical & Biological Transducers / 8：

Microfluidic Devices / 9：

Introduction and Overview / 1：

Micromachining Techniques / 2：

Mechanical Transducers / 3：

Optical Transducers / 4：

Ionizing Radiation Transducers / 5：

Thermal Transducers / 6：

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