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1998 International Conference on Ion Implantation Technology proceedings : Ion Implantation Technology-98, Kyoto, Japan, June 22-26, 1998 / editors, J. Matsuo, G. Takaoka, I. Yamada

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c1999
形態:
2v., xxv, 1276 p. ; 28cm
著者名:
ISBN:
9780780345386 [078034538X] (:set. softbound)
書誌ID:
BA48879906
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