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Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium / editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

資料種別:
図書
出版情報:
Pennington, New Jersey : Electrochemical Society, c1999
形態:
xi, 284 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 99-6 <BA01323290>
著者名:
ISBN:
9781566772280 [1566772281]
書誌ID:
BA4897493X
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