Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

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Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA / Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c2000

形態:

ix , 328 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4099 <BA0022700X>

著者名:

ISBN:

9780819437440 [0819437441]

書誌ID:

BA49673994

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書誌詳細

注記:	Includes bibliographical references and index
言語:	英語

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