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2000, 5th international symposium on plasma process - induced damage / editors, Mitsumasa Koyanagi, Manfred Engelhardt, and Calvin T. Gabriel

資料種別:
図書
出版情報:
Santa Clara : American Vacuum Society, c2000
形態:
172 p. ; 28 cm
著者名:
ISBN:
9780965157742 [0965157741]
書誌ID:
BA50991239
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