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Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A. / editors, G.S Oehrlein ... [et al.]

資料種別:
図書
出版情報:
Warrendale, PA : Materials Research Society, 2001
形態:
1 v. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 612 <BA00013775>
著者名:
Oehrlein, G.S  
ISBN:
9781558995208 [155899520X]
書誌ID:
BA52824872
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