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Interconnect and contact metallization for ULSI : proceedings of the international symposium / editors, G.S. Mathad ...[et al.]

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2000
形態:
ix, 340 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 99-31 <BA01323290>
著者名:
ISBN:
9781566772549 [1566772540]
書誌ID:
BA53255987
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