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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium / editors, R.E. Novak ... [et al.] ; assistant editors, L. Shive ... [et al.]

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c2000

形態:

xiii, 614 p. ; 24 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 99-36 <BA01323290>

著者名:

ISBN:

9781566772594 [1566772591]

書誌ID:

BA53256957

子書誌情報

フルテキスト

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他の版・巻

書誌詳細

その他の標題:	Cleaning technology in semiconductor device manufacturing VI
注記:	Includes bibliographical references and indexes
言語:	英語

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