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2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c2001
形態:
vii, 244 p. ; 28 cm
著者名:
ISBN:
9780780365551 [0780365550] (: soft)
書誌ID:
BA53827366
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