2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany | 東京工業大学附属図書館蔵書検索

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2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2001 proceedings, 23-24 April 2001 Munich, Germany / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Service Center, c2001

形態:

vii, 244 p. ; 28 cm

著者名:

ISBN:

9780780365551 [0780365550] (: soft)

書誌ID:

BA53827366

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書誌詳細

その他の標題:	The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : ASMC 2001 : factory dynamics, process control, advanced process technology, yield modeling and analysis, defect detection and reduction, April 23-24, International Congress Centre, Munich, Germany 01CH37160
ISSN:	10788743
注記:	Includes bibliographical references "IEEE catalog number 01CH37160"--T.p. verso
言語:	英語

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