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Plasma processing XIII : proceedings of the international symposium / editor, G.S. Mathad ; assistant editors, G.K. Celler ... [et al.] ; [cosponsored by] Dielectric Science and Technology and Electronics Divisions

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2000
形態:
ix, 394 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2000-6 <BA01323290>
著者名:
ISBN:
9781566772716 [1566772710]
書誌ID:
BA54323200
子書誌情報
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