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Microfabricated Systems and MEMS V : proceedings of the International Symposium / editors, P.J. Hesketh ... [et al.]

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2000
形態:
viii, 258 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2000-19 <BA01323290>
著者名:
ISBN:
9781566772860 [1566772869]
書誌ID:
BA54507280
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