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High Purity Silicon VI : proceedings of the sixth International Symposium / editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division

資料種別:
図書
出版情報:
Bellingham, Wash. : Published in cooperation with SPIE-the International Society for Optical Engineering
Pennington, N.J. : Electrochemical Society, c2000
形態:
xix, 696 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2000-17 <BA01323290>
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4218 <BA0022700X>
著者名:
ISBN:
9781566772846 [1566772842]
書誌ID:
BA54509162
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