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Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium / editors, K.B. Sundaram ... [et al.]

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2001
形態:
x, 286 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2001-7 <BA01323290>
著者名:
ISBN:
9781566773133 [156677313X]
書誌ID:
BA54513104
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