Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

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Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. / editors, Harold Kahn ... [et al.]

資料種別:: 図書
出版情報:: Warrendale, Pa. : Materials Research Society, c2001
形態:: 1 v. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 657 <BA00013775>
著者名:: Kahn, Harold <DA13344498>
ISBN:: 9781558995673 [1558995676]
書誌ID:: BA54946961

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その他の標題:

Materials science of microelectromechanical systems (MEMS) devices 3

注記:

Includes bibliographical references and indexes

言語:

英語

目次情報:

Preface

Materials Research Society Symposium Proceedings

Metrology

Temperature-Dependent Internal Friction in Silicon Nanoelectromechanical Systems / Stephane Evoy ; Anatoli Olkhovets ; Dustin W. Carr ; Jeevak M. Parpia ; Harold G. Craighead

Resonating Microelectromechanical Structures for Metrology / A.M. Allen ; G.C. Johnson

Mechanical Properties

On the Fracture Toughness of Polysilicon MEMS Structures / H. Kahn ; R. Ballarini ; A.H. Heuer

The Influence of Fabrication Governed Surface Conditions on the Mechanical Strength of Thin Film Materials / Ioannis Chasiotis ; Wolfgang G. Knauss

On the Evolution of Surface Morphology of Polysilicon MEMS Structures During Fatigue / S.M. Allameh ; B. Gally ; S. Brown ; W.O. Soboyejo

Anelastic Creep Phenomena in Thin Metal Plated Cantilevers for MEMS / Deborah J. Vickers-Kirby ; Randall L. Kubena ; Frederic P. Stratton ; Richard J. Joyce ; David T. Chang ; Jinsoo Kim

Tribology

Novel Chemistry for Surface Engineering in MEMS / X.-Y. Zhu ; Y. Jun ; V. Boiadjiev ; R. Major ; H.I. Kim ; J.E. Houston

Electro-Deposited Metals and PZT

Elastic and Inelastic Properties of Electroplated Nickel Used in LIGA Techniques / Skandar Basrour ; Patrick Delobelle

Structural and Micromechanical Assessment of Electrochemically Grown Metal Layers for Si Magnetic Microactuators / Susanna Martinez ; Nourdin Yaakoubi ; Christophe Serre ; Alejandro Perez-Rodriguez ; Joan Ramon Morante ; Ismael Diez-Perez ; Pau Gorostiza ; Jaume Esteve

Defects and Failure Modes in PZT Films for a MEMS Microengine / D.F. Bahr ; B.T. Crozier ; C.D. Richards ; R.F. Richards

Dielectric and Pulsed Spectroscopy of Shear Mode PZT Microactuator / Jurgen Brunahl ; Alex Grishin ; Sergey Khartsev

Poster Session

Multilayer Materials for Electrostatic Switches / Mark A. Phillips ; Brennan L. Peterson ; Christine M. Esber ; Jesse Hwang ; Bruce M. Clemens

Optical Manipulation of Inorganic and Organic Objects in Soft Microfluidic Devices / Cengiz S. Ozkan ; Erhan Ata ; Mihrimah Ozkan ; Sadik C. Esener

Adjustment of Membrane Stress Using Aluminum Oxide and Silicon Dioxide Multi Layer Structure / Ryuichi Kubo ; Yukio Yoshino ; Kazuhiro Inoue ; Takahiro Makino ; Seiichi Arai

Young's Modulus and Fracture Strength of Three Polysilicons / W.N. Sharpe, Jr. ; K. Jackson ; G. Coles ; D.A. LaVan

High-Cycle Fatigue of Polycrystalline Silicon Thin Films in Laboratory Air / C.L. Muhlstein ; S.B. Brown ; R.O. Ritchie

Finite Element Analysis of the Precracked Line Scratch Test / A.A. Volinsky ; L. Mercado ; V. Sarihan ; W.W. Gerberich

Deformation Mechanisms of a Micro-Sized Austenitic Stainless Steel With Fine Grains / G.P. Zhang ; K. Takashima ; M. Shimojo ; Y. Higo

Corrosion Fatigue Tests of Micro-Sized Specimens / Y. Mizutani ; Y. Ichikawa ; A. Morita ; M. V. Swain

Anisotropic Fracture Behavior of Electroless Deposited Ni-P Amorphous Alloy Thin Films / Kazuki Takashima ; Akio Ogura ; Yusuke Ichikawa ; Yakichi Higo

Temperature and Doping Dependency of Piezoresistivity in P-Type Silicon / Eivind Lund ; Terje G. Finstad

Curvature Model for an Ion-Machined Free-Standing Thin Film MEMS Device / H.T. Johnson ; P. Bierden ; T.G. Bifano

Nanoindentation of Microspring Thin Films / Mary W. Seto ; Brian Dick ; Michael J. Brett

Effect of La on the Growth of Cu[subscript 6]Sn[subscript 5] Intermetallic Compound for Improved Sn-Pb Solder Joints / Xin Ma ; Hongyuan Fang ; Yiyu Qian ; Fusahito Yoshida

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors / Youngman Kim ; Sung-Ho Choo

Control of Stress With Growth Conditions and Mechanical Parameters Determination of 3C-SiC Heteroepitaxial Thin Films / C. Gourbeyre ; T Chassagne ; M. Le Berre ; G. Ferro ; C. Malhaire ; Y. Monteil ; D. Barbier

Double Sided Porous Silicon on Patterned Substrates for Thermal Effect Microsystems / S. Perichon ; V. Lysenko ; B. Remaki

On the Role of the Underlying Microstructure on the Mechanical Properties of Microelectromechanical Systems (MEMS) Materials / G.F. Dirras ; A.J Wagner ; S. Carlo ; C. Newman ; K.J. Hemker

Annealing Effects on the Microstructure and Mechanical Properties of LIGA Nickel for MEMS / H.S. Cho ; W.G. Babcock ; H. Last

Unstable Etching of Si(110) With Potassium Hydroxide / Z. Moktadir ; K. Sato ; T. Shimizu ; M. Shikida

Simple and Low Cost Patterning Process for Sputtered Pb(Zr,Ti)O[subscript 3] Thin Films and Electrodes for Membrane-Based Microsystems Applications / Cyril Millon ; Christophe Malhaire ; Emmanuel Defay ; Daniel Barbier

Microfabrication of Crevice Corrosion Samples / Xiaoyan Wang ; Robert G. Kelly ; Jason S. Lee ; Michael L. Reed

Etch Rate and Surface Morphology of Plasma Etched Glass Substrates / Junting Liu ; Nikolay I. Nemchuk ; Dieter G. Ast ; J. Gregory Couillard

Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties / A.V. Sumant ; O. Auciello ; A.R. Krauss ; D.M. Gruen ; D. Ersoy ; J. Tucek ; A. Jayatissa ; E. Stach ; N. Moldovan ; D. Mancini ; H.G. Busmann ; E.M. Meyer

Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections / Edward S. Kolesar ; Peter B. Allen ; Noah C. Boydston ; Jeffery T. Howard ; Simon Y. Ko ; Matthew D. Ruff ; Josh M. Wilken ; Richard J. Wilks

Issues in the Flexible Integration of Sputter-Deposited PZT Thin Films With Polysilicon and Ti/Pt Electrode Layers for Use as Sensors and Actuators in Microelectromechanical Systems (MEMS) / C.F. Knollenberg ; T.D. Sands ; A.S. Nickles ; R.M. White

Measurement of Electrical Charge During Nanoindentation of Ferroelectric Thin Films / M. Alguero ; A.J. Bushby ; M.J. Reece

Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications / L.-P. Wang ; R. Wolf ; Q. Zhou ; S. Trolier-McKinstry ; R.J. Davis

Packaging

Challenges in DMD Assembly and Test / S. Joshua Jacobs ; Joshua J. Malone ; Seth A. Miller ; Armando Gonzalez ; Roger Robbins ; Vincent C. Lopes ; Dennis Doane

Characterization of Silicon Fusion Bonds Using a Four-Point Bend Specimen / Kevin T. Turner ; Arturo A. Ayon ; Dongwon Choi ; Bruno Miller ; S. Mark Spearing

Phenomenological Model of Non-Evaporated Getter for Microelectromechanical Systems (MEMS) Applications / Caroline A. Kondoleon ; Thomas F. Marinis

High Temperature, High-Pressure Fluid Connections for Power Micro-Systems / Todd S. Harrison ; Adam P. London

New Materials

Developing a New Material for MEMS: Amorphous Diamond / J.P. Sullivan ; T.A. Friedmann ; M.P. de Boer ; R.J. Hohlfelder ; C.I.H. Ashby ; M.T. Dugger ; M. Mitchell ; R.G. Dunn ; A.J. Magerkurth

Preparation of Mesoporous Oxides for MEMS Structures / Jong-Ah Paik ; Nobuaki Kitazawa ; Shih-Kang Fan ; Chang-Jin Kim ; Ming C. Wu ; Bruce Dunn

Silicon Germanium Epitaxy: A New Material for MEMS / J.T. Borenstein ; N.D. Gerrish ; R. White ; M.T. Currie ; E.A. Fitzgerald

Optical Microsystems and Processing Techniques I

The Characterization of TiNi Shape-Memory Actuated Microvalves / B.-K. Lai ; G. Hahm ; L. You ; C.-L. Shih ; S.M. Phillips

Processing of Thick Dielectric Films for Power MEMS: Stress and Fracture / Kuo-Shen Chen ; Xin Zhang

Microbridge Testing of Silicon Oxide/Silicon Nitride Bilayer Films / C.-F. Qian ; Y.-J. Su ; M.-H. Zhao ; T.-Y. Zhang

Processing Techniques II

Low Temperature Si Direct Bonding by Plasma Activation / Yonah Cho ; Nathan W. Cheung

MEMS Materials and Fabrication Technology on Large Areas: The Example of an X-ray Imager / J.H. Daniel ; B. Krusor ; R. Lau ; J.P. Lu ; Y. Wang ; M. Mulato ; R.B. Apte ; R.A. Street ; A. Goredema ; D.C. Boils-Boissier ; S.E. Silver ; P.M. Kazmaier

Micropatterning of Ceramics on Substrates Towards Gas Sensing Applications / Martin Heule ; Lorenz Meier ; Ludwig J. Gauckler

The Mechanical Properties of Polycrystalline Silicon Carbide Films Determined Using Bulk Micromachined Diaphragms / Shuvo Roy ; Christian Zorman ; Mehran Mehregany

Author Index

Subject Index

Preface

Materials Research Society Symposium Proceedings

Metrology

Temperature-Dependent Internal Friction in Silicon Nanoelectromechanical Systems / Stephane Evoy ; Anatoli Olkhovets ; Dustin W. Carr ; Jeevak M. Parpia ; Harold G. Craighead

Resonating Microelectromechanical Structures for Metrology / A.M. Allen ; G.C. Johnson

Mechanical Properties

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