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Fabrication of silicon microprobes for optical near-field applications / by Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

資料種別:
図書
出版情報:
Boca Raton : CRC, c2002
形態:
180 p. ; 25 cm.
著者名:
ISBN:
9780849311543 [0849311543]
書誌ID:
BA56597171
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