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Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, Erin C. Jones ... [et al.]

資料種別:
図書
出版情報:
Warrendale, PA : Materials Research Society, c2001
形態:
1 v. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 669 <BA00013775>
著者名:
ISBN:
9781558996052 [1558996052]
書誌ID:
BA56818510
子書誌情報
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