Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, Erin C. Jones ... [et al.]
- 資料種別:
- 図書
- 出版情報:
- Warrendale, PA : Materials Research Society, c2001
- 形態:
- 1 v. ; 24 cm
- シリーズ名:
- Materials Research Society symposium proceedings ; v. 669 <BA00013775>
- 著者名:
- ISBN:
- 9781558996052 [1558996052]
- 書誌ID:
- BA56818510
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