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Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell ... [et al.]

資料種別:
図書
出版情報:
Warrendale, PA : Materials Research Society, c2002
形態:
1 v. (various pagings) ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 670 <BA00013775>
著者名:
ISBN:
9781558996069 [1558996060]
書誌ID:
BA56818598
子書誌情報
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