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Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. / editors, Suryadevara V. Babu ... [et al.]

資料種別:
図書
出版情報:
Warrendale, PA : Materials Research Society, c2001
形態:
1 v. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 671 <BA00013775>
著者名:
ISBN:
9781558996076 [1558996079]
書誌ID:
BA56818816
子書誌情報
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