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2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Service Center, c2002
形態:
v, 430 p. ; 28 cm
著者名:
ISBN:
9780780371583 [0780371585] (: soft)
書誌ID:
BA56874216
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