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Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002 / sponsored by IEEE and the Robotics and Automation Society

資料種別:
図書
出版情報:
Piscataway, N.J. : IEEE Operations Center, c2002
形態:
xliii, 737 p. ; 28 cm
著者名:
ISBN:
9780780371859 [0780371852]
書誌ID:
BA56874318
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