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Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau

資料種別:
図書
出版情報:
Dordrecht : Kluwer Academic, c2002
形態:
xiii, 363 p. ; 25 cm
シリーズ名:
NATO science series ; Sub-series II, Mathematics, physics and chemistry ; v. 55 <BA40559140>
著者名:
ISBN:
9781402005244 [1402005245]
9781402005251 [1402005253] (: pb)
書誌ID:
BA57112551
子書誌情報
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